Design and Fabrication of Compact MEMS Electromagnetic Micro-Actuator with Planar Micro-Coil Based on PCB
Abstract: This paper reports a
compact design of electromagnetically driven MEMS micro-actuator utilizing planar
electromagnetic coil on PCB (Printed Circuit Board). The micro-actuator device
consists of an NdFeB permanent magnet, thin silicon membrane and planar
micro-coil which fabricated using simple standard MEMS techniques with
additional bonding step. Two planar coils designs including planar parallel and
spiral coil structure with various coil geometry are chosen for the study.
Analysis of the device involves the investigation of electromagnetic and
mechanical properties using finite element analysis (FEA), the measurement of
the membrane deflection and functionality test. The measurement results show
that the thin silicon membrane is able to deform as much as 12.87 µm using
planar spiral micro-coil. Reasonable match between simulation and measurement
of about 82.5% has been revealed. The dynamic response test on actuator driven
by parallel planar coil shows that silicon membrane effectively deformed in 40
s for an input electrical power of only 150 mW. It is also concluded that
planar parallel coil is considered for the simple structure and easy
fabrication of the actuator system. This study will provide important
parameters for the development of compact and simple electromagnetic
micro-actuator system for fluidic injection system in lab-on-chip .
Keywords: MEMS,
electromagnetic micro-actuator, printed circuit board (PCB), silicon membrane,
planar micro-coil
Author: Roer Eka Pawinanto
Journal Code: jptkomputergg160143
