THIN FILM-BASED SENSOR FOR MOTOR VEHICLE EXHAUST GAS, NH3, AND CO DETECTION
ABSTRACT: Acopper
phthalocyanine (CuPc) thin flm based gas sensor with FET structure and channel
length 100 μm has been prepared by VE method and lithography technique to
detect NH3, motor cycle exhaust gases and CO. CuPc material layer was deposited
on SiO2 by the vacuum evaporator (VE) method at room temperature and pressure
of 8 x10-4 Pa. The stages of manufacturing gas sensor were Si/SiO2 substrate
blenching with ethanol in an ultrasonic cleaner, source, and drain electrodes
deposition on the substrate by using a vacuum evaporator, thin flm deposition
between the source/drain and gate deposition. The sensor response times to NH3,
motorcycle exhaust gases and CO were 75 s, 135 s, and 150, respectively. The
recovery times were 90 s, 150 s and 225, respectively. It is concluded that the
CuPc thin flm-based gas sensor with FET structure is the best sensor to detect
the NH3 gas.
Author: Sujarwata, P. Marwoto,
L. Handayani
Journal Code: jpfisikagg160022
