X-ray Photoelectron Spectroscopy (XPS) Analysis of Undoped ZnO and ZnO:Er
ABSTRACT: Undoped ZnO
and ZnO:Er thin
films were deposited
on p-type Si
substrates by ultrasonic
spray pyrolisis (USP). Undoped
and ZnO:Er thin
films have been
analyzed by using
X-ray Photoelectron Spectroscopy
(XPS). The results show that the XPS spectrum has two Er peak at ∼157
eV and ∼168 eV. The XPS Zn 2p spectrum of undoped ZnO and
ZnO:Er thin films have binding energy for Zn 2p3/2 (~ 1021 eV) and Zn
2p1/2 (~1045eV) were found no shift in
binding energy after the incorporation of Er. Meanwhile, after Er incorporates
into ZnO, the O 1s spectrum is composed two peak of binding energy (BE) at
~530.5eV and the shoulder about 532.5 eV.
Author: Thin Films
Journal Code: jppendidikangg150100
