PENUMBUHAN DAN KARAKTERISASI LAPISAN TIPIS PbTiO3 YANG DISIAPKAN DENGAN TEKNIK SPIN COATING
ABSTRACT: The growth of PbTiO3
ferroelectric thin films have successfully done. Thin films were made from bulk
(powder) PbTiO3 dissolved in methanol solution. The condensation was mixed
during 1 hour to get homogeneous condensation. Thin films were grown above corning
substrates by spin coating method. Optimation was done by various of annealing
temperature. The physical properties of thin films were characterized by Energi
Dispersive X-Ray Spectroscopy (EDS), X-Ray Diffraction (XRD), Scanning and
Electron Microscopy (SEM). EDS measurement showed that the stoichiometry
composition ratio of Pb/Ti is 1/1.26 at annealing temperature 600oC and 1/1.29
at annealing temperature 700oC. The result of XRD pattern showed that crystal
structure of PbTiO3 thin films are tetragonal. The calculated lattice
parameters ontained from Chohen Method are a=b= 3.873 Å dan c= 4.130Å. The
result of SEM PbTiO3 thin film showed that thin film has globular grain size.
Keyword: PbTiO3 thin film,
spin coating method, characterization EDS, XRD and SEM
Penulis: Bilalodin
Kode Jurnal: jpkimiadd080018
