ABSTRACT: Niobium (Nb) doped Titanium dioxide (TiO2)
thin films have been successfully grown using spin coating method.
Characterizations of thin films was carried out using EDAX (Energy Dispersion
Analysis for X-Ray), XRD (X-Ray Diffaction) and SEM (Scanning Electron
Microscope) to determine the microstructure of thin films. Determination
microstructure, particularly of crystal structure was examined using ICDD data,
whereas porosity calculation was done using the toolbox application on Matlab 6.1
software. EDAX, XRD and SEM characterization show that the thin films grown
well at the Si substrates with the (002) field orientation is dominant and the
thin film has the rutile structure. The TiO2: Nb thin films product
have granules round, uniform grain size and porosity value of about 41%.
Keyword: Thin film, TiO2, Nb doping
Penulis: Bilalodin dan Mukhtar Effendi
Kode Jurnal: jpkimiadd100048
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