Measurement and Simulation Techniques for Piezoresistive Microcantilever Biosensor Applications
Abstract: Applications of
microcantileversas biosensors have been explored by many researchers for the
applications in medicine, biological, chemistry, and environmental monitoring.
This research discusses a design of measurement method and simuations
forpiezoresistivemicrocantileveras a biosensor, which consist of designing
Wheatstone bridge circuit as object detector, simulation of resonance frequency
shift based on Euler Bernoulli Beam equation, and microcantilever vibration
simulation using COMSOL Multiphysics 3.5. The piezoresistivemicrocantilever
used here is Seiko Instrument Technology (Japan) product with length of 110 μm,
width of 50 μm, and thickness of 1 μm. Microcantilever mass is 12.815 ng,
including the mass receptor. The sample object in this research is bacteria
EColi. One bacteria mass is assumed to 0.3 pg. Simulation results show that the
mass of one bacterium will cause the deflection of 0.03053 nm and resonance
frequency value of 118.90 kHz. Moreover, four bacterium will cause the
deflection of 0.03054 nm and resonance frequency value of 118.68 kHz. These
data indicate that the increasing of the bacteria mass increases the deflection
value and reduces the value of resonance frequency.
Author: Aan Febriansyah, Ratno
Nuryadi, Djoko Hartanto
Journal Code: jptkomputergg120102
