Pengaruh Rasio Laju Alir Gas Nitrogen-Hidrogen serta Gas Pressure pada RF Plasma Nitriding terhadap Surface Hardness Spesimen SUS304
Abstract: RF Plasma nitriding
was done on the specimen SUS304. The research had aim to obtain a high surface hardness
value. The conducted research was experimental research and consisted of three
experimental models. Each experimental model used varying parameters and
constant parameters. Surface hardness test was conducted on each result of the
experimental model. Surface hardness value of specimen was as a result of
variations in the specified parameters in each of the experimental model.
Surface hardness or micro hardness test method in the research was the Micro
Vickers Hardness. For the first experimental model, the variable parameter was
time of plasma nitriding, ie, 1 hour, 2 hours, 4 hours and 8 hours. Theconstant
parameters were RF-Power Voltage = 250 Volts, DC-Bias Voltage = 500 Volts, N2=
100 (ml/min), H2= 20 (ml/min), Gas pressure (P) = 70 Pa and Heater Temperature
(T) = 420oC. The second experimental model contained three variable parameters
of nitrogen gas pressure ie, 50 Pa, 60 Pa and 70 Pa. The constant parameters of
the second experimental model were time of plasma nitriding (t) = 8 Hours,
RF-Power Voltage = 250 Volts, Heater Temperature (T) = 420oC, N2 = 140
(ml/min), H2= 20(ml/min). The first and second experimental models had the same
configuration.The third experimentalmodel used three variations of the flow
rate of nitrogen gas, ie, 140 (ml/ min), 160 (ml/min), 180 (ml/min). The
constant parameters were time of plasma nitriding (t) = 4 hours, RF-Voltage =
250 volts, The Heater temperature (T) = 420oC; H2 = 20 (ml/min), DC-Bias
Voltage = 500 Volts, the gas pressure (P) = 60 Pa.The configuration of third
experimental model was different with the configurations in first and second experimental
models.Values of surface hardness on the first experimental model for plasma
nitriding time of 1 hour, 2 hours, 4 hours and 8 hours were; 379 HV, 348 HV,
474 HV and 387 HV.The surface hardness values of the second experimental model
were 586 HV, 607HV, 249 HV. While the results of surface hardness value of the
third experimental model were 313 HV, 574 HV, 677 HV. From the results of
surface hardness of SUS304 specimen and observation of variable parameters
could be concluded that the ratio between the flow rate of nitrogen and
hydrogen gas into the vacuum chamber and gas pressure affected the value of the
surface hardness. At the gas pressure of 60 Pa and the nitrogen gas flow rate
of 180 (ml/min) obtained the highest surface hardness value of 677 HV.
Penulis: Tjuk Oerbandono
Kode Jurnal: jptmesindd160652
